Gesloten
Openbaar
Metrology SEM+FIB system
Publicatie-ID: 434821
Details
Publicatiedatum
28 juli 2026
Deadline
7 september 2026
Geschatte waarde
€ 1.300.000,00
CPV-codes
31712000-0
38900000-4
Omschrijving
The main purpose of this FIB/SEM equipment is to perform material milling (cutting), 3D characterization, and cross section analysis of epitaxially grown InP, InGaAs, InAlGaAs and InGaAsP layers on InP substrates. The structures may also contain polymer-based planarization layers, SiOx or SiNx dielectric layers and TiPtAu or NiGeAu metal layers.