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XUV Piezo Cluster
Publicatie-ID: 356791
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The XUV Optics Group in MESA+ Institute at University of Twente tends to invest in the XUV Piezo Cluster to carry research on piezoelectric film-based sensors and actuators. The aim is to scale up the piezoelectric film coating capabilities to larger substrate dimensions with more advanced process control systems that enable to explore a broader process window.