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UHV Evaporator system
Publicatie-ID: 341927
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Opdrachtgever
Universiteit TwentePublicatiedatum
3 juli 2024
Omschrijving
The MESA+ Institute will invest in a new UHV evaporator deposition system in which metals can be deposited on flag style sample plates, and in which samples can be etched before deposition in a separate chamber. It should be possible to dock a user-made UHV suitcase on the loadlock for in-situ sample transfer.