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UHV Sputter system
Publicatie-ID: 341922
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Opdrachtgever
Universiteit TwentePublicatiedatum
3 juli 2024
Omschrijving
The MESA+ Institute will invest in a UHV Sputter system to replace the current UHV Sputter systems with a state-of-the-art system that will bring more advanced process control and better process conditions (by means of a UHV system) to the lab. The system will be used for the deposition of metals onto various samples that have been processed in one or more deposition / lithography steps within the NanoLab facilities.